課程介紹
| (中) 介紹薄膜製程的基本原理，包含真空技術的發展、氣體的動力理論、薄膜成長之機制與結構分析、各式薄膜成長設備等。 (Eng.) Introduce the fundamental knowledge of thin film deposition, including the development of high vacuum system, kinetic theory of gases, thin film growth mechanism and analysis, and various modern thin film deposition methods. |
教科書:
1. "Materials Science of thin films", M. Ohring, Academic Press, Boston (2002).
2. "Physical Vapor Deposition of Thin Film", J. E. Mahan, John Wiley and Sons, New York (2000).
3. Lectures
2. "Physical Vapor Deposition of Thin Film", J. E. Mahan, John Wiley and Sons, New York (2000).
3. Lectures
教學進度:
1-2: Review of material sciences
3-5: Vacuum sciences and techniques
5-9: various thin film deposition methods
10: Midterm exam
11-13: Growth mechanism and characterization of thin films
14-16: Applications of thin films
17: Oral presentation
18: Final exam
3-5: Vacuum sciences and techniques
5-9: various thin film deposition methods
10: Midterm exam
11-13: Growth mechanism and characterization of thin films
14-16: Applications of thin films
17: Oral presentation
18: Final exam
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