Montgomery, D.C., Introduction to Statistical Quality Control, 6th Ed. John Wiley & Sons, Inc., 2009, ISBN 978-0-470-16992-6.

May, G.S., Spanos, C.J., Fundamentals of Semiconductor Manufacturing and Process Control, John Wiley & Sons, Inc., 2006, ISBN 978-0-471-79027-3.

週次  日     期  章     節  內                                                    容

1      106/02/20     1.1-1.2     Introduction

2      106/03/01        1.3        Process Modeling for Control                           

3      106/03/06        3.1        Sources of Variation

4      106/03/13        3.2        The Nature of Variation

5      106/03/20     5.2-5.5     Describing Variation: Probability and Random Variables

6      106/03/27     6.2-6.4     Shewhart Model of Manufacturing and Charting

7      106/04/03  Spring Break

8      106/04/10     7.2-7.4     Statistical Process Control: Charting and Capability

9      106/04/17     8.2-8.8     Statistical Process Control: Method and Capability

10     106/04/24   13.1-13.2   Introduction Empirical Process Modeling and Optimization

11     106/05/01       13.3       Designed Experiments

12     106/05/08        4.3        Model Building and Testing

13     106/05/15  Mid Term

14     106/05/22     4.4-4.5     Analysis of Variance and Model Testing

15     106/05/31       13.6       Optimization using Empirical Models

16     106/06/05   13.4-13.6   Fractional Factorial Models

17     106/06/12   14.1-14.3   Process Optimization with Designed Experiments

18     106/06/19   Final Exam